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ASME _ Journal of micro- and nano-manufacturing.   Publication: . v. 28 cm. Availability: Copies available: AUM Main Library (1),
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Introduction to microfabrication / by Franssila, Sami. Publication: Chichester, England : Wiley, 2004 . xvii, 401 p. : 26 cm. Date:2004 Availability: Copies available: AUM Main Library (1),
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